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[ 特殊顯微鏡設備 | Wafer Probing | 高階多功能型 6"用 ]

Analytical Probe Station/4點探針/探針量測儀
  Manual Probe Station for wafer 6"/高階多功能型6"用

 
Model:BD-6

 

 Features

 Coaxial-Driven Chuck Stage

 RF Probing Field Upgradable

 20X~4000X Magnification

 Backlash-Free Movement

 Platen Linear Quick Up/Down
 Easy Load/Unload wafer

 Platen Linear Fine Up/Down
 Probe Card Tip Overdrive Adjustment

 Specifications

 Vacuum Chuck

 6" Stainless Steel

 Chuck Stage

 6" x6" Travel

 Chuck Theta

 0~30 degree

 Platen Up/Down

 6mm Adjustable

 Coarse Adjustment  Lever-Driven

 Platen Up/Down
 Fine Adjustment

 25 mm Adjustable
 Hand Wheel-Driven

 Platen

 12 Micropositioner

 Microscope Stage

 1" x1" Travel

 Requirements

 Electrical

 110 VAC, 60Hz

 Vacuum

 -250 mmHg, 7 liter/min

 Dimensions

 780mmW x 660mmD x 700mmH With Microscope

 Weight 80 Kg With Microscope

 Accessories

 Wafer Chuck Pull-out Stage

 Miroscope Tilting Mechanism

 RF Prone/Cables

 Active Probes

 Low Current/Capacitance Probes

 High Voltage Probe

 Laser Cutter

 Ultrasonic Cutter

 CCTV System

 Photomicrographics

 Probe Card holder

 Packaged Device Holder

 PCB Holder

 Thermal Systems

 Liquid Crystal Kit

 Vibration Free Table

 Shielding Box

 Test Bench

 Instrument Case with Caster

 Dark Field/Normarski Inspection

 Chuck Vacuum Pattern

 Gold Plated Chuck

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update: 2017-10-19