[ 光學顯微鏡｜顯微鏡附件-自動載物台｜正立顯微鏡用載物台H105 ]

■ 正立顯微鏡用載物台H105【ProScan TM Stage】 ■

電動載平台

154mm x 154mm Travel, Motorised Scanning Stage for larger Upright Research Microscopes.

The H105 is part of a full range of ProScan II stages designed to fit most upright microscopes. Automatically scan large samples including semi-conductor wafers, photo masks, and printed circuit boards, with the ability to store points for later recollection and inspection with unmatched repeatability. The H105 can easily accommodate 6 inch wafers. The large variety of sample holders are released quickly and easily interchanged, we also provide customisable sample holder service. Manufactured to the highest quality with crossed roller ways, zero backlash recalculating ball screws, X and Y limit switches, and high precision stepper motors.

■ Dimensions

■ Features:

Travel Range 154mmx154mm
Variety of Sample Holder
<1um Resolution
+/-0.7um Repeatability and Better
Interchangeable Sample Holders
Choice of High Precision Ball Screw
Anti-Backlash Mechanism
Adjustable Limit Switches
Accepts Linear Encoders
RS232 and USB Control

電動載平台

> 載物台規格

Specifications	H105/2##	H105/5##	HE05/2##	HE05/5##
Uni -Directional repeatability in X and Y.	+/- 0.7um	+/- 0.7um	+/- 0.7um	+/- 0.7um
**Metric Accuracy per mm	0.15um	0.15um	0.15um	0.15um
Squareness	70(arc sec)	70(arc sec)	70(arc sec)	70(arc sec)
Travel Range	154x154mm	154x154mm	154x154mm	154x154mm
Minimum Step size	0.04um	0.1um	0.04um	0.1um
Recommend speed	24mms-1	60mms-1	24mms-1	60mms-1

■ H105 Performance

Intelligent Scanning Technology (IST):

The ProScan II controller and stage include as standard IST which significantly improves the metric accuracy of the ProScan stage ranges.

Stage Mapping:

Utilising IST technology Stage Mapping maps each stages discrepancies from true, whereas IST maps the stage as a whole the Stage Mapping system subdivides the stage into a component grid and each sub-grid has IST applied. For larger stages this further enhances metric error figures.

電動載平台

For more information or to order Stage Mapping with your H105 stage contact your local sales representative.

> 規格

Part No.	Average Performance
Part No.	Uni -Directional repeatability in X and Y.	**Metric Accuracy (per mm of travel)
H105/2##.	+/- 0.3um	0.06um
H105/5##	+/- 0.5um	0.06um

Copyright © 2004 Power Assist Instrument Scientific Corp. All Right Reserved

update： 2020-03-27