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[ 電子顯微鏡前處理設備 | Desktop Coater ]

■ Desktop Coater System
    -Desktop Coater for Thin Film Research & Product Development
llustrated：

Cressington 308R with:
belljar 12"O (305mm) x 14" high (358mm);
16 port feedthrough collar (5-3445);
2 evaporation sources & 3 sputter heads;
dual output evaporation supply (LT1500);
2 dual output sputter supplies (DC100);
thickness monitor (MTM10)

Evaporation：

※ Wide range of coating techniques using
　 boats, baskets, crucibles and baffle boxes.
※ Compact source holder designs with flexible
　 positioning in chamber.
※ Multiple sources and mixed technology, (mix
　 with sputtering or E-beam).
※ Water-cooled sources and high output
　 power supplies gives wide range of
　 deposition materials.
Sputtering：

※ Compact sputter head design with total
　 freedom of positioning in chamber.
※ Wide range of coating materials using DC or
　 RF power.
※ Multiple heads and mixed technology, (mix
　 with resistive evap or E-beam).
※ Regular or water cooled options.

Mixed Technology Coating：

※Chamber designed for combined use of sputtering
　 and evaporation techniques.
※Programmable turbo-drag pump allows rapid changeover
　 from sputtering pressure to evaporation pressure.
※Sputter heads with swing-in/swing-out positioning
　 and close fitting shutters.
※Multiple sputter heads and multiple evap sources
　in a single deposition cycle.
Thickness Measurement：

※ Accurate thickness measurement using
　 compact low cost monitors.
※ Chamber furniture designed for multiple
　 thickness monitor heads.
※ Thickness controller/terminator option.
Power Supplies：

※ Dual output resistive supplies up to 400A
　 continuous rating.
※ Twin sputter supplies for simultaneous
　 deposition of two materials.
※ Electron beam evaporation supplies for
　 water-cooled mini bent beam gun.
※ All power supplies fitted with pre-wired
　 feedthroughs and vacuum safety switches.
Feedthroughs：

※ Single and multiple feedthroughs for water
　 based on a range of KF and ISO flanges.
※ Instrumentation feedthroughs for
　 measurement, thermocouples and heaters.
※ LT and HT power feedthroughs with integral
　 vacuum switch and KF40 connector flange.
※ Liquid nitrogen feedthrough system.
Pump Stations：

※ Fully automatic desktop pump station based
　 on turbo drag pump.
※ Rapid and safe automatic switchover from
　 high vacuum to sputtering pressures.
※ Inert gas standby feature gives very rapid
　 pump down.
   
 
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update： 2020-03-27