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[ 電子顯微鏡前處理設備 | Desktop Coater ]

Desktop Coater System
    -Desktop Coater for Thin Film Research & Product Development

llustrated:

Cressington 308R with:
belljar 12"O (305mm) x 14" high (358mm);
16 port feedthrough collar (5-3445);
2 evaporation sources & 3 sputter heads;
dual output evaporation supply (LT1500);
2 dual output sputter supplies (DC100);
thickness monitor (MTM10)

Evaporation:

Wide range of coating techniques using
  boats, baskets, crucibles and baffle boxes.
Compact source holder designs with flexible
  positioning in chamber.
Multiple sources and mixed technology, (mix
  with sputtering or E-beam).
Water-cooled sources and high output
  power supplies gives wide range of
  deposition materials.

Sputtering:

Compact sputter head design with total
  freedom of positioning in chamber.
Wide range of coating materials using DC or
  RF power.
Multiple heads and mixed technology, (mix
  with resistive evap or E-beam).
Regular or water cooled options.

Mixed Technology Coating:

Chamber designed for combined use of sputtering
  and evaporation techniques.
Programmable turbo-drag pump allows rapid changeover
  from sputtering pressure to evaporation pressure.
Sputter heads with swing-in/swing-out positioning
  and close fitting shutters.
Multiple sputter heads and multiple evap sources
 in a single deposition cycle.

Thickness Measurement:

Accurate thickness measurement using
  compact low cost monitors.
Chamber furniture designed for multiple
  thickness monitor heads.
Thickness controller/terminator option.
Power Supplies:

Dual output resistive supplies up to 400A
  continuous rating.
Twin sputter supplies for simultaneous
  deposition of two materials.
Electron beam evaporation supplies for
  water-cooled mini bent beam gun.
All power supplies fitted with pre-wired
  feedthroughs and vacuum safety switches.
Feedthroughs:

Single and multiple feedthroughs for water
  based on a range of KF and ISO flanges.
Instrumentation feedthroughs for
  measurement, thermocouples and heaters.
LT and HT power feedthroughs with integral
  vacuum switch and KF40 connector flange.
Liquid nitrogen feedthrough system.
Pump Stations:

Fully automatic desktop pump station based
  on turbo drag pump.
Rapid and safe automatic switchover from
  high vacuum to sputtering pressures.
Inert gas standby feature gives very rapid
  pump down.
   
 
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update: 2017-10-19